The growth of carbon nanotubes on electrically conductive ZrN support layers for through-silicon vias

S Vollebregt, S Banerjee, FD Tichelaar, R Ishihara

Research output: Contribution to journal › Article › Scientific › peer-review

5 Citations (SciVal)

Original language	English
Pages (from-to)	126-130
Number of pages	5
Journal	Microelectronic Engineering
Volume	156
DOIs	https://doi.org/10.1016/j.mee.2016.01.034
Publication status	Published - 2016

Harvest
Sourish Banerjee = Indushree Banerjee? Tu Delft
Article in press; Available online 29 January 2016
gecheckt 5-4-2016

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title = "The growth of carbon nanotubes on electrically conductive ZrN support layers for through-silicon vias",

author = "S Vollebregt and S Banerjee and FD Tichelaar and R Ishihara",

note = "Harvest Sourish Banerjee = Indushree Banerjee? Tu Delft Article in press; Available online 29 January 2016 gecheckt 5-4-2016",

year = "2016",

doi = "10.1016/j.mee.2016.01.034",

language = "English",

volume = "156",

pages = "126--130",

journal = "Microelectronic Engineering",

issn = "0167-9317",

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T1 - The growth of carbon nanotubes on electrically conductive ZrN support layers for through-silicon vias

AU - Vollebregt, S

AU - Banerjee, S

AU - Tichelaar, FD

AU - Ishihara, R

N1 - Harvest Sourish Banerjee = Indushree Banerjee? Tu Delft Article in press; Available online 29 January 2016 gecheckt 5-4-2016

PY - 2016

Y1 - 2016

U2 - 10.1016/j.mee.2016.01.034

DO - 10.1016/j.mee.2016.01.034

M3 - Article

SN - 0167-9317

VL - 156

SP - 126

EP - 130

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -