The high-tech world of lithography

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of Electronics-ET 2008
Editors	s.n.
Place of Publication	Sozopol, Bulgaria
Publisher	Electronics 2008
Pages	15-24
Number of pages	10
Publication status	Published - 2008
Event	Elecronics 2008, Sozopol, Bulgaria - Sozopol, Bulgaria Duration: 24 Sept 2008 → 26 Sept 2008

Name
Publisher	Electronics 2008

Conference	Elecronics 2008, Sozopol, Bulgaria
Period	24/09/08 → 26/09/08

Keywords

@inproceedings{27c636eeef944b609b6ca8a48b53710f,

title = "The high-tech world of lithography",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "S Nihtianov",

year = "2008",

language = "Undefined/Unknown",

publisher = "Electronics 2008",

pages = "15--24",

editor = "s.n.",

booktitle = "Proceedings of Electronics-ET 2008",

note = "Elecronics 2008, Sozopol, Bulgaria ; Conference date: 24-09-2008 Through 26-09-2008",

}

TY - GEN

T1 - The high-tech world of lithography

AU - Nihtianov, S

PY - 2008

Y1 - 2008

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 15

EP - 24

BT - Proceedings of Electronics-ET 2008

A2 - s.n., null

PB - Electronics 2008

CY - Sozopol, Bulgaria

T2 - Elecronics 2008, Sozopol, Bulgaria

Y2 - 24 September 2008 through 26 September 2008

ER -