The influence of ion beam parameters on pattern resolution

PWH Jager, CW Hagen, P Kruit

    Research output: Contribution to journal › Article › Scientific › peer-review

    12 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)353-356
    Number of pages4
    JournalMicroelectronic Engineering
    Volume30
    Publication statusPublished - 1996

    Cite this