The influence of scale-up on the formation of gaseous byproducts in stagnation flow CVD reactors

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	13th International Conference on Chemical Vapor Deposition
Editors	TM Besman
Pages	83-88
Number of pages	6
Publication status	Published - 1996

Cite this

@inproceedings{3a14dedf0ef04389b5b10dd4bf77238c,

title = "The influence of scale-up on the formation of gaseous byproducts in stagnation flow CVD reactors",

author = "CR Kleijn",

year = "1996",

language = "Undefined/Unknown",

isbn = "1-56677-155-2",

pages = "83--88",

editor = "TM Besman",

booktitle = "13th International Conference on Chemical Vapor Deposition",

}