The kinetics of tungsten deposition from a H2/WF6 mixture studied by in situ laser Raman scattering

TGM Oosterlaken, GJ Leusink, GCAM Janssen, S Radelaar

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the Thirteenth International Conference on Chemical Vapour Deposition
    EditorsMD Allendorf, TM Besman, McD Robinson, RK Ulrich
    PublisherElectrochemical Society
    Pages808-813
    Number of pages6
    Volume96
    Edition5
    ISBN (Print)9781566771559
    Publication statusPublished - 1996
    EventCVD XIII - 13th International Conference on Chemical Vapour Deposition - Los Angeles, CA, United States
    Duration: 5 May 199610 May 1996

    Publication series

    Name
    NameElectrochemical Society Proceedings
    PublisherElectrochemical Society

    Conference

    ConferenceCVD XIII - 13th International Conference on Chemical Vapour Deposition
    CountryUnited States
    CityLos Angeles, CA
    Period5/05/9610/05/96

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