@inproceedings{1a27987dca3a49fc857442f9a2815bcb,
title = "The kinetics of tungsten deposition from the H2/WF6 mixture studied by in situ laser Raman scattering",
author = "TGM Oosterlaken and GJ Leusink and GCAM Janssen and S Radelaar",
year = "1996",
language = "English",
publisher = "Materials Research Society",
pages = "549--553",
editor = "RC Ellwanger and {Shi-Qing Wang}",
booktitle = "Advanced Metallization and Interconnect Systems for ULSI Applications in 1995",
address = "United States",
}