The kinetics of tungsten deposition from the H2/WF6 mixture studied by in situ laser Raman scattering

TGM Oosterlaken, GJ Leusink, GCAM Janssen, S Radelaar

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationAdvanced Metallization and Interconnect Systems for ULSI Applications in 1995
    EditorsRC Ellwanger, Shi-Qing Wang
    Place of PublicationPittsburgh, USA
    PublisherMaterials Research Society
    Number of pages5
    Publication statusPublished - 1996

    Publication series

    PublisherMaterials Research Society

    Cite this