The long-term reliability of pre-charged CMUTs for the powering of deep implanted devices

Marta Saccher; Shinnosuke Kawasaki; Ronald Dekker

doi:10.1109/IUS52206.2021.9593683

The long-term reliability of pre-charged CMUTs for the powering of deep implanted devices

Marta Saccher, Shinnosuke Kawasaki, Ronald Dekker

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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Abstract

Recently, focused ultrasound has been proposed to power deeply implanted medical devices. Almost exclusively, lead zirconate titanate (PZT) transducers are used to convert acoustic energy into electrical energy. Unfortunately, these lead containing devices cannot be hermetically encapsulated since that would block the ultrasound. We propose the use of biocompatible Capacitive Micromachined Ultrasonic Transducer (CMUT) elements to replace traditional PZT transducers. In addition, to eliminate the external bias voltage, we introduced a charge trapping Al2O3 layer inside the CMUT to create a built-in bias voltage. These devices can be pre-charged and used as a receiver for US power. In this work, the viability of charged CMUTs to power deep implants was explored by investigating the effect of the charging parameters and by performing Accelerated Lifetime Tests (ALT). The estimated lifetime at body temperature ranges between 2.5 to 3.5 years at body temperature, which significantly depends on the charging parameters.

Original language	English
Title of host publication	2021 IEEE International Ultrasonics Symposium (IUS)
Subtitle of host publication	Proceedings
Place of Publication	Piscataway
Publisher	IEEE
Pages	1-4
Number of pages	4
ISBN (Electronic)	978-1-6654-0355-9
ISBN (Print)	978-1-6654-4777-5
DOIs	https://doi.org/10.1109/IUS52206.2021.9593683
Publication status	Published - 2021
Event	2021 IEEE International Ultrasonics Symposium (IUS) - Virtual at Xi'an, China Duration: 11 Sep 2021 → 16 Sep 2021

Conference

Conference	2021 IEEE International Ultrasonics Symposium (IUS)
Abbreviated title	IUS 2021
Country	China
City	Virtual at Xi'an
Period	11/09/21 → 16/09/21

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

capacitive micromachined ultrasound transducers
pre-charged CMUT
zero-bias transducers
ultrasound power transfer
accelerated lifetime test

Access to Document

10.1109/IUS52206.2021.9593683

IUS2021 - The long-term reliability of pre-charged CMUTs for the powering of deep implanted devicesSubmitted manuscript, 525 KB

Embargoed Document

The_long_term_reliability_of_pre_charged_CMUTs_for_the_powering_of_deep_implanted_devices
Final published version, 2.21 MB
Embargo ends: 16/05/22

Cite this

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title = "The long-term reliability of pre-charged CMUTs for the powering of deep implanted devices",

abstract = "Recently, focused ultrasound has been proposed to power deeply implanted medical devices. Almost exclusively, lead zirconate titanate (PZT) transducers are used to convert acoustic energy into electrical energy. Unfortunately, these lead containing devices cannot be hermetically encapsulated since that would block the ultrasound. We propose the use of biocompatible Capacitive Micromachined Ultrasonic Transducer (CMUT) elements to replace traditional PZT transducers. In addition, to eliminate the external bias voltage, we introduced a charge trapping Al2O3 layer inside the CMUT to create a built-in bias voltage. These devices can be pre-charged and used as a receiver for US power. In this work, the viability of charged CMUTs to power deep implants was explored by investigating the effect of the charging parameters and by performing Accelerated Lifetime Tests (ALT). The estimated lifetime at body temperature ranges between 2.5 to 3.5 years at body temperature, which significantly depends on the charging parameters.",

keywords = "capacitive micromachined ultrasound transducers, pre-charged CMUT, zero-bias transducers, ultrasound power transfer, accelerated lifetime test",

author = "Marta Saccher and Shinnosuke Kawasaki and Ronald Dekker",

note = "Green Open Access added to TU Delft Institutional Repository {\textquoteleft}You share, we take care!{\textquoteright} – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. ; 2021 IEEE International Ultrasonics Symposium (IUS), IUS 2021 ; Conference date: 11-09-2021 Through 16-09-2021",

year = "2021",

doi = "10.1109/IUS52206.2021.9593683",

language = "English",

isbn = "978-1-6654-4777-5",

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booktitle = "2021 IEEE International Ultrasonics Symposium (IUS)",

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address = "United States",

}

Saccher, M , Kawasaki, S & Dekker, R 2021, The long-term reliability of pre-charged CMUTs for the powering of deep implanted devices. in 2021 IEEE International Ultrasonics Symposium (IUS): Proceedings., 9593683, IEEE , Piscataway, pp. 1-4, 2021 IEEE International Ultrasonics Symposium (IUS), Virtual at Xi'an, China, 11/09/21. https://doi.org/10.1109/IUS52206.2021.9593683

The long-term reliability of pre-charged CMUTs for the powering of deep implanted devices. / Saccher, Marta ; Kawasaki, Shinnosuke ; Dekker, Ronald.

2021 IEEE International Ultrasonics Symposium (IUS): Proceedings. Piscataway : IEEE , 2021. p. 1-4 9593683.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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N1 - Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

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N2 - Recently, focused ultrasound has been proposed to power deeply implanted medical devices. Almost exclusively, lead zirconate titanate (PZT) transducers are used to convert acoustic energy into electrical energy. Unfortunately, these lead containing devices cannot be hermetically encapsulated since that would block the ultrasound. We propose the use of biocompatible Capacitive Micromachined Ultrasonic Transducer (CMUT) elements to replace traditional PZT transducers. In addition, to eliminate the external bias voltage, we introduced a charge trapping Al2O3 layer inside the CMUT to create a built-in bias voltage. These devices can be pre-charged and used as a receiver for US power. In this work, the viability of charged CMUTs to power deep implants was explored by investigating the effect of the charging parameters and by performing Accelerated Lifetime Tests (ALT). The estimated lifetime at body temperature ranges between 2.5 to 3.5 years at body temperature, which significantly depends on the charging parameters.

AB - Recently, focused ultrasound has been proposed to power deeply implanted medical devices. Almost exclusively, lead zirconate titanate (PZT) transducers are used to convert acoustic energy into electrical energy. Unfortunately, these lead containing devices cannot be hermetically encapsulated since that would block the ultrasound. We propose the use of biocompatible Capacitive Micromachined Ultrasonic Transducer (CMUT) elements to replace traditional PZT transducers. In addition, to eliminate the external bias voltage, we introduced a charge trapping Al2O3 layer inside the CMUT to create a built-in bias voltage. These devices can be pre-charged and used as a receiver for US power. In this work, the viability of charged CMUTs to power deep implants was explored by investigating the effect of the charging parameters and by performing Accelerated Lifetime Tests (ALT). The estimated lifetime at body temperature ranges between 2.5 to 3.5 years at body temperature, which significantly depends on the charging parameters.

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CY - Piscataway

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Y2 - 11 September 2021 through 16 September 2021

ER -

The long-term reliability of pre-charged CMUTs for the powering of deep implanted devices

Abstract

Conference

Bibliographical note

Keywords

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