The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film

CA Yuan, AE Flower, O van der Sluis, GQ Zhang, LJ Ernst, M Cherkaoui, WD van Driel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of EuroSimE 2008
EditorsLJ Ernst, GQ Zhang, WD van Driel, P Rodgers, O de Saint Leger
Place of PublicationFreiburg
PublisherIEEE Society
Pages27-30
Number of pages4
ISBN (Print)978-1-4244-2127-5
Publication statusPublished - 2008
Event9th international conference on Thermal, mechanical and multi-physics simulation and experiments in micro-electronics and microsystems - Freiburg
Duration: 21 Apr 200823 Apr 2008

Publication series

Name
PublisherIEEE

Conference

Conference9th international conference on Thermal, mechanical and multi-physics simulation and experiments in micro-electronics and microsystems
Period21/04/0823/04/08

Keywords

  • Conf.proc. > 3 pag

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