@inproceedings{22c74694c1c648d886679fe24badd5f6,
title = "The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film",
keywords = "Conf.proc. > 3 pag",
author = "CA Yuan and AE Flower and {van der Sluis}, O and GQ Zhang and LJ Ernst and M Cherkaoui and {van Driel}, WD",
year = "2008",
language = "Undefined/Unknown",
isbn = "978-1-4244-2127-5",
publisher = "IEEE Society",
pages = "27--30",
editor = "LJ Ernst and GQ Zhang and {van Driel}, WD and P Rodgers and {de Saint Leger}, O",
booktitle = "Proceedings of EuroSimE 2008",
note = "9th international conference on Thermal, mechanical and multi-physics simulation and experiments in micro-electronics and microsystems ; Conference date: 21-04-2008 Through 23-04-2008",
}