The MEMSamp: using (RF-)MEMS switches for the micromechanical amplification of electronic signals

WM van Spengen, SB Roobol, WP Klaassen, TH Oosterkamp

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Journal	Journal of Micromechanics and Microengineering
Volume	20
Issue number	12
Publication status	Published - 2010

Keywords

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title = "The MEMSamp: using (RF-)MEMS switches for the micromechanical amplification of electronic signals",

keywords = "professional journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "{van Spengen}, WM and SB Roobol and WP Klaassen and TH Oosterkamp",

year = "2010",

language = "English",

volume = "20",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

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number = "12",

}

TY - JOUR

T1 - The MEMSamp: using (RF-)MEMS switches for the micromechanical amplification of electronic signals

AU - van Spengen, WM

AU - Roobol, SB

AU - Klaassen, WP

AU - Oosterkamp, TH

PY - 2010

Y1 - 2010

KW - professional journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0960-1317

VL - 20

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 12

ER -