The next generation of MEMS-based optical microspectrometers

RF Wolffenbuttel

doi:10.1117/12.2179059

The next generation of MEMS-based optical microspectrometers

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
Editors	R Brama, JL Sánchez-Rojas
Place of Publication	Bellingham, WA, USA
Publisher	SPIE
Pages	95170I-1-95170I-12
DOIs	https://doi.org/10.1117/12.2179059
Publication status	Published - 2015
Event	Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, Barcelona, Spain - Bellingham, WA, USA Duration: 4 May 2015 → 4 May 2015

Publication series

Name
Publisher	SPIE

Name	Proceedings of SPIE- International Society for Optical Engineering
Volume	9517
ISSN (Print)	0277-786X

Conference

Conference	Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, Barcelona, Spain
Period	4/05/15 → 4/05/15

Bibliographical note

Harvest

Access to Document

10.1117/12.2179059

Cite this

@inproceedings{612bcc5b5be0406ea6026b86e0702267,

title = "The next generation of MEMS-based optical microspectrometers",

author = "RF Wolffenbuttel",

note = "Harvest; Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, Barcelona, Spain ; Conference date: 04-05-2015 Through 04-05-2015",

year = "2015",

doi = "10.1117/12.2179059",

language = "English",

publisher = "SPIE",

pages = "95170I--1--95170I--12",

editor = "R Brama and JL S{\'a}nchez-Rojas",

booktitle = "Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems",

address = "United States",

}

Wolffenbuttel, RF 2015, The next generation of MEMS-based optical microspectrometers. in R Brama & JL Sánchez-Rojas (eds), Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems. Proceedings of SPIE- International Society for Optical Engineering, vol. 9517, SPIE, Bellingham, WA, USA, pp. 95170I-1-95170I-12, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, Barcelona, Spain, 4/05/15. https://doi.org/10.1117/12.2179059

The next generation of MEMS-based optical microspectrometers. / Wolffenbuttel, RF.
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems. ed. / R Brama; JL Sánchez-Rojas. Bellingham, WA, USA: SPIE, 2015. p. 95170I-1-95170I-12 (Proceedings of SPIE- International Society for Optical Engineering; Vol. 9517).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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DO - 10.1117/12.2179059

M3 - Conference contribution

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BT - Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems

A2 - Brama, R

A2 - Sánchez-Rojas, JL

PB - SPIE

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