The next generation of MEMS-based optical microspectrometers

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationSmart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
EditorsR Brama, JL Sánchez-Rojas
Place of PublicationBellingham, WA, USA
PublisherSPIE
Pages95170I-1-95170I-12
DOIs
Publication statusPublished - 2015
EventSmart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, Barcelona, Spain - Bellingham, WA, USA
Duration: 4 May 20154 May 2015

Publication series

Name
PublisherSPIE
NameProceedings of SPIE- International Society for Optical Engineering
Volume9517
ISSN (Print)0277-786X

Conference

ConferenceSmart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, Barcelona, Spain
Period4/05/154/05/15

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