The piezojunction effect as an alternative to the piezoresistive effect for low-power silicon mechanical-stress micro sensors

F Fruett, GCM Meijer

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings
Place of PublicationS.l.
Publishers.n.
Pages169-170
Number of pages2
ISBN (Print)1225-3278
Publication statusPublished - 2001
EventInternational Sensor Conference 2001, Seoul - S.l.
Duration: 11 Oct 200112 Oct 2001

Publication series

Name
PublisherS.n.

Conference

ConferenceInternational Sensor Conference 2001, Seoul
Period11/10/0112/10/01

Keywords

  • ZX Int.klas.verslagjaar < 2002

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