The properties of a-SiC:H and a-SiGe:H films deposited by 55 kHz PECVD

BG Budaguan; AA Sherchenkov; AE Berdnikov; JW Metselaar; AA Aivazov

The properties of a-SiC:H and a-SiGe:H films deposited by 55 kHz PECVD

BG Budaguan, AA Sherchenkov, AE Berdnikov, JW Metselaar, AA Aivazov

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Materials Research Society symposium proceedings, vol. 557
Editors	HM Branz, T Watanabe
Place of Publication	Warrendale
Publisher	Material Research Society
Pages	43-48
Number of pages	6
ISBN (Print)	1-55899-464-5
Publication status	Published - 1999
Event	Amorphous and Heterogeneous Silicon Thin Films: Fundamentals to Devices - 1999, San Francisco - Warrendale Duration: 5 Apr 1999 → 9 Apr 1999

Publication series

Name
Publisher	Material Research Society

Conference

Conference	Amorphous and Heterogeneous Silicon Thin Films: Fundamentals to Devices - 1999, San Francisco
Period	5/04/99 → 9/04/99

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{04da157be73242fe9d0a712924db32ee,

title = "The properties of a-SiC:H and a-SiGe:H films deposited by 55 kHz PECVD",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "BG Budaguan and AA Sherchenkov and AE Berdnikov and JW Metselaar and AA Aivazov",

year = "1999",

language = "Undefined/Unknown",

isbn = "1-55899-464-5",

publisher = "Material Research Society",

pages = "43--48",

editor = "{HM Branz} and {T Watanabe}",

booktitle = "Materials Research Society symposium proceedings, vol. 557",

note = "Amorphous and Heterogeneous Silicon Thin Films: Fundamentals to Devices - 1999, San Francisco ; Conference date: 05-04-1999 Through 09-04-1999",

}

Budaguan, BG, Sherchenkov, AA, Berdnikov, AE, Metselaar, JW & Aivazov, AA 1999, The properties of a-SiC:H and a-SiGe:H films deposited by 55 kHz PECVD. in HM Branz & T Watanabe (eds), Materials Research Society symposium proceedings, vol. 557. Material Research Society, Warrendale, pp. 43-48, Amorphous and Heterogeneous Silicon Thin Films: Fundamentals to Devices - 1999, San Francisco, 5/04/99.

The properties of a-SiC:H and a-SiGe:H films deposited by 55 kHz PECVD. / Budaguan, BG; Sherchenkov, AA; Berdnikov, AE et al.
Materials Research Society symposium proceedings, vol. 557. ed. / HM Branz; T Watanabe. Warrendale: Material Research Society, 1999. p. 43-48.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - The properties of a-SiC:H and a-SiGe:H films deposited by 55 kHz PECVD

AU - Budaguan, BG

AU - Sherchenkov, AA

AU - Berdnikov, AE

AU - Metselaar, JW

AU - Aivazov, AA

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 1-55899-464-5

SP - 43

EP - 48

BT - Materials Research Society symposium proceedings, vol. 557

A2 - HM Branz, null

A2 - T Watanabe, null

PB - Material Research Society

CY - Warrendale

T2 - Amorphous and Heterogeneous Silicon Thin Films: Fundamentals to Devices - 1999, San Francisco

Y2 - 5 April 1999 through 9 April 1999

ER -