The relationship between microsystem technology and metrology

RF Wolffenbuttel, CJ Mullem

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1469-1475
Number of pages7
JournalIEEE Transactions on Instrumentation and Measurement
Volume50
Issue number6
Publication statusPublished - 2001

Keywords

  • Elektrotechniek
  • Techniek
  • ZX CWTS JFIS < 1.00

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