The role of MEMS in Maskless Lithography

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1027-1032
Number of pages	6
Journal	Microelectronic Engineering
Volume	84
Issue number	5-8
Publication status	Published - 2007

Keywords

@article{eb70c212db724f1d93374b73e4dc5f63,

title = "The role of MEMS in Maskless Lithography",

keywords = "academic journal papers, CWTS JFIS < 0.75",

author = "P Kruit",

year = "2007",

language = "Undefined/Unknown",

volume = "84",

pages = "1027--1032",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "5-8",

}