The role of MEMS in Maskless Lithography

    Research output: Contribution to journalArticleScientificpeer-review

    25 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1027-1032
    Number of pages6
    JournalMicroelectronic Engineering
    Volume84
    Issue number5-8
    Publication statusPublished - 2007

    Keywords

    • academic journal papers
    • CWTS JFIS < 0.75

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