The role of secondary electrons in Electron-Beam-Induced-Deposition spatial resolution

N Silvis-Cividjian

    Research output: Contribution to journalArticleScientific

    107 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)693-699
    Number of pages7
    JournalMicroelectronic Engineering
    Volume61-62
    Publication statusPublished - 2002

    Keywords

    • ZX CWTS JFIS < 1.00

    Cite this