The role of secondary electrons in Electron-Beam-Induced-Deposition spatial resolution

N Silvis-Cividjian

Research output: Contribution to journal › Article › Scientific

Original language	Undefined/Unknown
Pages (from-to)	693-699
Number of pages	7
Journal	Microelectronic Engineering
Volume	61-62
Publication status	Published - 2002

Keywords

@article{d946d6b36ef145faaf7ce8ffc267b27f,

title = "The role of secondary electrons in Electron-Beam-Induced-Deposition spatial resolution",

keywords = "ZX CWTS JFIS < 1.00",

author = "N Silvis-Cividjian",

year = "2002",

language = "Undefined/Unknown",

volume = "61-62",

pages = "693--699",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}