The role of the silyl radical in plasma deposition of microcrystalline silicon

C Smit, RACMM van Swaaij, EAG Hamers, MCM van de Sanden

Research output: Contribution to journal › Article › Scientific › peer-review

ed.is niet bekend

Keywords

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title = "The role of the silyl radical in plasma deposition of microcrystalline silicon",

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author = "C Smit and {van Swaaij}, RACMM and EAG Hamers and {van de Sanden}, MCM",

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year = "2004",

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volume = "96",

pages = "4076--4083",

journal = "Journal of Applied Physics",

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T1 - The role of the silyl radical in plasma deposition of microcrystalline silicon

AU - Smit, C

AU - van Swaaij, RACMM

AU - Hamers, EAG

AU - van de Sanden, MCM

N1 - ed.is niet bekend

PY - 2004

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KW - ZX CWTS 1.00 <= JFIS < 3.00

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