The role of the silyl radical in plasma deposition of microcrystalline silicon

C Smit, RACMM van Swaaij, EAG Hamers, MCM van de Sanden

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)4076-4083
Number of pages8
JournalJournal of Applied Physics
Issue number8
Publication statusPublished - 2004

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