The Schottky emitter as a source for multi-electron-beam instruments

X. Guo

doi:10.4233/uuid:304cdd73-083a-4f89-ad47-f192e84a5313

The Schottky emitter as a source for multi-electron-beam instruments

X. Guo

ImPhys/Hoogenboom group

Research output: Thesis › Dissertation (TU Delft)

82 Downloads (Pure)

Abstract

In this thesis, the author investigates the extended Schottky source for the application in a multi-beam source (MBS). The work has been done in both theoretical work and experimental work.

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Kruit, P., Promotor Hoogenboom, J.P., Promotor
Award date	4 Sept 2024
Print ISBNs	978-94-6384-617-2
DOIs	https://doi.org/10.4233/uuid:304cdd73-083a-4f89-ad47-f192e84a5313
Publication status	Published - 2024

Keywords

Schottky source
Multi-beam instrument
Scanning electron microscope

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10.4233/uuid:304cdd73-083a-4f89-ad47-f192e84a5313

PhD_Thesis_Xiaoli GuoFinal published version, 18.6 MB

Cite this

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title = "The Schottky emitter as a source for multi-electron-beam instruments",

abstract = "In this thesis, the author investigates the extended Schottky source for the application in a multi-beam source (MBS). The work has been done in both theoretical work and experimental work.",

keywords = "Schottky source, Multi-beam instrument, Scanning electron microscope",

author = "X. Guo",

year = "2024",

doi = "10.4233/uuid:304cdd73-083a-4f89-ad47-f192e84a5313",

language = "English",

isbn = "978-94-6384-617-2",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

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AU - Guo, X.

PY - 2024

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N2 - In this thesis, the author investigates the extended Schottky source for the application in a multi-beam source (MBS). The work has been done in both theoretical work and experimental work.

AB - In this thesis, the author investigates the extended Schottky source for the application in a multi-beam source (MBS). The work has been done in both theoretical work and experimental work.

KW - Schottky source

KW - Multi-beam instrument

KW - Scanning electron microscope

U2 - 10.4233/uuid:304cdd73-083a-4f89-ad47-f192e84a5313

DO - 10.4233/uuid:304cdd73-083a-4f89-ad47-f192e84a5313

M3 - Dissertation (TU Delft)

SN - 978-94-6384-617-2

ER -

The Schottky emitter as a source for multi-electron-beam instruments

Abstract

Keywords

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Cite this