The surface transient in Si for SIMS with oblique low-energy o2+ beams.

ZX Jiang, PFA Alkemade

    Research output: Contribution to journalArticleScientificpeer-review

    24 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)125-131
    Number of pages7
    JournalSurface and Interface Analysis
    Volume27
    Publication statusPublished - 1999

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