Thermal analysis, fabrication and signal processing of surface microma-chined thermal conductivity based gas sensors

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publication21st Micromechanics and Micro systems Europe 2010
EditorsL Abelmann, H Groenland, J van Honschoten, H Verputten
Place of PublicationEnschede, The Netherlands
PublisherMME
Pages173-176
Number of pages4
ISBN (Print)978-90-816737-1-6
Publication statusPublished - 2010
Event MME 2010: Micromechanics and Microsystems Europe Workshop - Enschede, The Netherlands
Duration: 26 Sep 201029 Sep 2010

Publication series

Name
PublisherMME

Conference

Conference MME 2010
Period26/09/1029/09/10

Keywords

  • Conf.proc. > 3 pag

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