Thermal annealing of thin PECVD silicon-oxide films for airgap-based optical filters

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Thermal annealing of thin PECVD silicon-oxide films for airgap-based optical filters'. Together they form a unique fingerprint.

INIS

Material Science

Engineering