@inproceedings{9752866921f34351933ed858041dd479,
title = "Thermal budget considerations for excimer laser annealing of implanted dopants",
keywords = "Conf.proc. > 3 pag",
author = "V Gonda and J Venturini and C Sabatier and {van der Cingel}, J and LK Nanver",
year = "2009",
language = "Undefined/Unknown",
publisher = "MRS",
pages = "1--4",
editor = "C Boulmer-Leborgne and G Dinescu and J Kruger and S Orlando and HU Habermeier",
booktitle = "Proc. of E-MRS 2009 Spring Meeting",
note = "null ; Conference date: 08-06-2009 Through 12-06-2009",
}