Thermal budget considerations for excimer laser annealing of implanted dopants

V Gonda; J Venturini; C Sabatier; J van der Cingel; LK Nanver

Thermal budget considerations for excimer laser annealing of implanted dopants

V Gonda, J Venturini, C Sabatier, J van der Cingel, LK Nanver

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proc. of E-MRS 2009 Spring Meeting
Editors	C Boulmer-Leborgne, G Dinescu, J Kruger, S Orlando, HU Habermeier
Place of Publication	Strasbourg, France
Publisher	MRS
Pages	1-4
Number of pages	4
Publication status	Published - 2009
Event	E-MRS 2009 Spring Meeting - Strasbourg, France Duration: 8 Jun 2009 → 12 Jun 2009

Publication series

Name
Publisher	MRS

Conference

Conference	E-MRS 2009 Spring Meeting
Period	8/06/09 → 12/06/09

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{9752866921f34351933ed858041dd479,

title = "Thermal budget considerations for excimer laser annealing of implanted dopants",

keywords = "Conf.proc. > 3 pag",

author = "V Gonda and J Venturini and C Sabatier and {van der Cingel}, J and LK Nanver",

year = "2009",

language = "Undefined/Unknown",

publisher = "MRS",

pages = "1--4",

editor = "C Boulmer-Leborgne and G Dinescu and J Kruger and S Orlando and HU Habermeier",

booktitle = "Proc. of E-MRS 2009 Spring Meeting",

note = "null ; Conference date: 08-06-2009 Through 12-06-2009",

}

Thermal budget considerations for excimer laser annealing of implanted dopants. / Gonda, V; Venturini, J; Sabatier, C; van der Cingel, J; Nanver, LK.

Proc. of E-MRS 2009 Spring Meeting. ed. / C Boulmer-Leborgne; G Dinescu; J Kruger; S Orlando; HU Habermeier. Strasbourg, France : MRS, 2009. p. 1-4.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Thermal budget considerations for excimer laser annealing of implanted dopants

AU - Gonda, V

AU - Venturini, J

AU - Sabatier, C

AU - van der Cingel, J

AU - Nanver, LK

PY - 2009

Y1 - 2009

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 1

EP - 4

BT - Proc. of E-MRS 2009 Spring Meeting

A2 - Boulmer-Leborgne, C

A2 - Dinescu, G

A2 - Kruger, J

A2 - Orlando, S

A2 - Habermeier, HU

PB - MRS

CY - Strasbourg, France

Y2 - 8 June 2009 through 12 June 2009

ER -