Thermal budget considerations for excimer laser annealing of implanted dopants

V Gonda, J Venturini, C Sabatier, J van der Cingel, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProc. of E-MRS 2009 Spring Meeting
EditorsC Boulmer-Leborgne, G Dinescu, J Kruger, S Orlando, HU Habermeier
Place of PublicationStrasbourg, France
PublisherMRS
Pages1-4
Number of pages4
Publication statusPublished - 2009
EventE-MRS 2009 Spring Meeting - Strasbourg, France
Duration: 8 Jun 200912 Jun 2009

Publication series

Name
PublisherMRS

Conference

ConferenceE-MRS 2009 Spring Meeting
Period8/06/0912/06/09

Keywords

  • Conf.proc. > 3 pag

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