Thermal budget considerations for excimer laser annealing of implanted dopants

V Gonda, J Venturini, C Sabatier, J van der Cingel, LK Nanver

Research output: Contribution to journal › Article › Scientific › peer-review

3 Citations (SciVal)

Original language	English
Pages (from-to)	466-469
Number of pages	4
Journal	Journal of Optoelectronics and Advanced Materials
Volume	12
Issue number	3
Publication status	Published - 2010

Keywords

@article{8da7431eea8b4cd897ed6589cb8636d5,

title = "Thermal budget considerations for excimer laser annealing of implanted dopants",

keywords = "CWTS JFIS < 0.75",

author = "V Gonda and J Venturini and C Sabatier and {van der Cingel}, J and LK Nanver",

year = "2010",

language = "English",

volume = "12",

pages = "466--469",

journal = "Journal of Optoelectronics and Advanced Materials",

issn = "1454-4164",

publisher = "National Institute of Optoelectronics",

number = "3",

}

TY - JOUR

T1 - Thermal budget considerations for excimer laser annealing of implanted dopants

AU - Gonda, V

AU - Venturini, J

AU - Sabatier, C

AU - van der Cingel, J

AU - Nanver, LK

PY - 2010

Y1 - 2010

KW - CWTS JFIS < 0.75

UR - http://cat.inist.fr/?aModele=afficheN&cpsidt=22690208

M3 - Article

SN - 1454-4164

VL - 12

SP - 466

EP - 469

JO - Journal of Optoelectronics and Advanced Materials

JF - Journal of Optoelectronics and Advanced Materials

IS - 3

ER -