Thermal Model of Miniaturized Schottky Emitter for Parallel Electron Beam Lithography

AK Dokania, JFM Velthuis, Y Zhang, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	504-507
Number of pages	4
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	25
Issue number	2
Publication status	Published - 2007

Keywords

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title = "Thermal Model of Miniaturized Schottky Emitter for Parallel Electron Beam Lithography",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "AK Dokania and JFM Velthuis and Y Zhang and P Kruit",

year = "2007",

language = "Undefined/Unknown",

volume = "25",

pages = "504--507",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "2",

}

TY - JOUR

T1 - Thermal Model of Miniaturized Schottky Emitter for Parallel Electron Beam Lithography

AU - Dokania, AK

AU - Velthuis, JFM

AU - Zhang, Y

AU - Kruit, P

PY - 2007

Y1 - 2007

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 1071-1023

VL - 25

SP - 504

EP - 507

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 2

ER -