@article{1852b72aee80415c937bedf9f69d6580,
title = "Thermal recovery of amorphous zones in 6H-SiC and 3C-SiC induced by low fluence 420 keV Xe irradiation",
keywords = "academic journal papers, ZX CWTS JFIS < 1.00",
author = "T Bus and \{van Veen\}, A and A.A. Shiryaev and AV Fedorov and H Schut and J Sietsma and FD Tichelaar",
year = "2003",
language = "Undefined/Unknown",
volume = "B 102",
pages = "269--276",
journal = "Materials Science and Engineering B: Advanced Functional Solid-state Materials",
issn = "0921-5107",
publisher = "Elsevier",
}