Thermal stabilisation of integrated silicon platforms using polysilicon and SiGe Peltier elements

DDL Wijngaards, SH Kong, M Bartek, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Transducers '99: digest of technical papers. Vol. 1
Place of Publication	Tokyo
Publisher	Institute of Electrical Engineers of Japan
Pages	310-313
Number of pages	4
Publication status	Published - 1999
Event	10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan - Tokyo Duration: 7 Jun 1999 → 10 Jun 1999

Name
Publisher	Institute of Electrical Engineers of Japan

Conference	10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan
Period	7/06/99 → 10/06/99

Keywords

@inproceedings{41813023787b48faba6c104cf6340c4e,

title = "Thermal stabilisation of integrated silicon platforms using polysilicon and SiGe Peltier elements",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "DDL Wijngaards and SH Kong and M Bartek and RF Wolffenbuttel",

year = "1999",

language = "Undefined/Unknown",

publisher = "Institute of Electrical Engineers of Japan",

pages = "310--313",

booktitle = "Transducers '99: digest of technical papers. Vol. 1",

note = "10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan ; Conference date: 07-06-1999 Through 10-06-1999",

}

Wijngaards, DDL, Kong, SH, Bartek, M & Wolffenbuttel, RF 1999, Thermal stabilisation of integrated silicon platforms using polysilicon and SiGe Peltier elements. in Transducers '99: digest of technical papers. Vol. 1. Institute of Electrical Engineers of Japan, Tokyo, pp. 310-313, 10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan, 7/06/99.

Thermal stabilisation of integrated silicon platforms using polysilicon and SiGe Peltier elements. / Wijngaards, DDL; Kong, SH; Bartek, M et al.
Transducers '99: digest of technical papers. Vol. 1. Tokyo: Institute of Electrical Engineers of Japan, 1999. p. 310-313.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Thermal stabilisation of integrated silicon platforms using polysilicon and SiGe Peltier elements

AU - Wijngaards, DDL

AU - Kong, SH

AU - Bartek, M

AU - Wolffenbuttel, RF

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SP - 310

EP - 313

BT - Transducers '99: digest of technical papers. Vol. 1

PB - Institute of Electrical Engineers of Japan

CY - Tokyo

T2 - 10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan

Y2 - 7 June 1999 through 10 June 1999

ER -