Thermal stepper: a high stability postioning system for micro adjustment

JP van Schieveen; JW Spronck; S Nihtianov; RH Munnig Schmidt

Thermal stepper: a high stability postioning system for micro adjustment

JP van Schieveen, JW Spronck, S Nihtianov, RH Munnig Schmidt

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	9th international conference of the european society for precision engineering and nanatechnology: san sebastian, spain
Editors	Brinkmeijer E. Spaan H. Brussel H van
Place of Publication	s.l.
Publisher	EUSPEN
Pages	110-114
Number of pages	5
ISBN (Print)	978-0-9553082-6-0
Publication status	Published - 2009
Event	9th international conference of the european society for precision engineering and nanatechnology: san sebastian, spain - s.l. Duration: 2 Jun 2009 → 5 Jun 2009

Publication series

Name
Publisher	Euspen

Conference

Conference	9th international conference of the european society for precision engineering and nanatechnology: san sebastian, spain
Period	2/06/09 → 5/06/09

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{df4b2c21c185429796b13a8f02f1032f,

title = "Thermal stepper: a high stability postioning system for micro adjustment",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "{van Schieveen}, JP and JW Spronck and S Nihtianov and {Munnig Schmidt}, RH",

year = "2009",

language = "Undefined/Unknown",

isbn = "978-0-9553082-6-0",

publisher = "EUSPEN",

pages = "110--114",

editor = "{Spaan H. Brussel H van}, {Brinkmeijer E.}",

booktitle = "9th international conference of the european society for precision engineering and nanatechnology: san sebastian, spain",

note = "9th international conference of the european society for precision engineering and nanatechnology: san sebastian, spain ; Conference date: 02-06-2009 Through 05-06-2009",

}

van Schieveen, JP, Spronck, JW , Nihtianov, S & Munnig Schmidt, RH 2009, Thermal stepper: a high stability postioning system for micro adjustment. in BE Spaan H. Brussel H van (ed.), 9th international conference of the european society for precision engineering and nanatechnology: san sebastian, spain. EUSPEN, s.l., pp. 110-114, 9th international conference of the european society for precision engineering and nanatechnology: san sebastian, spain, 2/06/09.

Thermal stepper: a high stability postioning system for micro adjustment. / van Schieveen, JP; Spronck, JW ; Nihtianov, S et al.
9th international conference of the european society for precision engineering and nanatechnology: san sebastian, spain. ed. / Brinkmeijer E. Spaan H. Brussel H van. s.l.: EUSPEN, 2009. p. 110-114.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Thermal stepper: a high stability postioning system for micro adjustment

AU - van Schieveen, JP

AU - Spronck, JW

AU - Nihtianov, S

AU - Munnig Schmidt, RH

PY - 2009

Y1 - 2009

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-0-9553082-6-0

SP - 110

EP - 114

BT - 9th international conference of the european society for precision engineering and nanatechnology: san sebastian, spain

A2 - Spaan H. Brussel H van, Brinkmeijer E.

PB - EUSPEN

CY - s.l.

T2 - 9th international conference of the european society for precision engineering and nanatechnology: san sebastian, spain

Y2 - 2 June 2009 through 5 June 2009

ER -