Thermo-electric characterization of APCVD PolySi/sub 0.7/Ge/sub 0.3/ for IC-compatible fabrication of integrated lateral Peltier elements

DDL Wijngaards, RF Wolffenbuttel

Research output: Contribution to journalArticleScientificpeer-review

31 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1014-1025
Number of pages12
JournalIEEE Transactions on Electron Devices
Volume52
Issue number5
DOIs
Publication statusPublished - 2005

Keywords

  • academic journal papers
  • ZX CWTS 1.00 <= JFIS < 3.00

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