@article{884f244f1cca41ec9ed5206ef6a09da6,
title = "Thermo-electric characterization of APCVD PolySi/sub 0.7/Ge/sub 0.3/ for IC-compatible fabrication of integrated lateral Peltier elements",
keywords = "academic journal papers, ZX CWTS 1.00 <= JFIS < 3.00",
author = "DDL Wijngaards and RF Wolffenbuttel",
year = "2005",
doi = "doi:10.1109/ted.2005.846315",
language = "Undefined/Unknown",
volume = "52",
pages = "1014--1025",
journal = "IEEE Transactions on Electron Devices",
issn = "0018-9383",
publisher = "IEEE",
number = "5",
}