| Original language | English |
|---|---|
| Title of host publication | Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS 2010) |
| Editors | Y. Suzuki, M. Wong |
| Place of Publication | Piscataway, NJ, USA |
| Publisher | IEEE |
| Pages | 683-686 |
| Number of pages | 4 |
| ISBN (Print) | 978-1-4244-5761-8 |
| DOIs | |
| Publication status | Published - 2010 |
| Event | IEEE MEMS 2010, Hong Kong SAR, China - Piscataway, NJ, USA Duration: 24 Jan 2010 → 28 Jan 2010 |
Publication series
| Name | |
|---|---|
| Publisher | IEEE |
Conference
| Conference | IEEE MEMS 2010, Hong Kong SAR, China |
|---|---|
| Period | 24/01/10 → 28/01/10 |
Keywords
- Conf.proc. > 3 pag
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