Thickness dependence of tensile stress in PVD chromium films

SY Grachev, GCAM Janssen

    Research output: Contribution to conferencePosterProfessional

    Original languageUndefined/Unknown
    Publication statusPublished - 2003
    Event2003 MRS Fall Meeting - Boston
    Duration: 1 Dec 20035 Dec 2003

    Other

    Other2003 MRS Fall Meeting
    Period1/12/035/12/03

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