Thickness dependence of tensile stress in PVD chromium films

SY Grachev, GCAM Janssen

    Research output: Book/ReportReportScientific

    Original languageUndefined/Unknown
    Place of PublicationAlbuquerque, USA
    PublisherSandia National Laboratories
    Number of pages1
    Publication statusPublished - 2003

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    PublisherSandia National Laboratories

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    Cite this

    Grachev, SY., & Janssen, GCAM. (2003). Thickness dependence of tensile stress in PVD chromium films. Sandia National Laboratories.