Thickness dependence of tensile stress in PVD chromium films

SY Grachev, GCAM Janssen

    Research output: Book/Report › Report › Scientific

    Original languageUndefined/Unknown
    Place of PublicationAlbuquerque, USA
    PublisherSandia National Laboratories
    Number of pages1
    Publication statusPublished - 2003

    Publication series

    Name
    PublisherSandia National Laboratories

    Keywords

    • Geen BTA classificatie

    Cite this