Thickness determination of thin (similar to 20 nm) microcrystalline silicon layers

A Gordijn, J Loffler, WM Arnoldbik, FD Tichelaar, JK Rath, REI Schropp

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	445-455
Number of pages	11
Journal	Solar Energy Materials & Solar Cells
Volume	87
Issue number	1-4
Publication status	Published - 2005

Keywords

@article{330676ddf79c45d6bd90e52288563c58,

title = "Thickness determination of thin (similar to 20 nm) microcrystalline silicon layers",

keywords = "academic journal papers, ZX CWTS 1.00 <= JFIS < 3.00",

author = "A Gordijn and J Loffler and WM Arnoldbik and FD Tichelaar and JK Rath and REI Schropp",

year = "2005",

language = "Undefined/Unknown",

volume = "87",

pages = "445--455",

journal = "Solar Energy Materials & Solar Cells",

issn = "0927-0248",

publisher = "North-Holland",

number = "1-4",

}

TY - JOUR

T1 - Thickness determination of thin (similar to 20 nm) microcrystalline silicon layers

AU - Gordijn, A

AU - Loffler, J

AU - Arnoldbik, WM

AU - Tichelaar, FD

AU - Rath, JK

AU - Schropp, REI

PY - 2005

Y1 - 2005

KW - academic journal papers

KW - ZX CWTS 1.00 <= JFIS < 3.00

M3 - Article

SN - 0927-0248

VL - 87

SP - 445

EP - 455

JO - Solar Energy Materials & Solar Cells

JF - Solar Energy Materials & Solar Cells

IS - 1-4

ER -