Thickness evaluation of deposited pureb layers in micro-/millimeter-sized windows to Si

V Mohammadi, S Ramesh, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

14 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings - 2014 IEEE International Conference on Microelectronic Test Structures
EditorsL Selmi, J Klootwijk, G Meneghesso, A Toffoli, F Driussi
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages194-199
Number of pages6
ISBN (Print)978-1-4799-2192-8
DOIs
Publication statusPublished - 2014
EventCMTS 2014, Udine, Italy - Piscataway, NJ, USA
Duration: 24 Mar 201427 Mar 2014

Publication series

Name
PublisherIEEE

Conference

ConferenceCMTS 2014, Udine, Italy
Period24/03/1427/03/14

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