Thin-film encapsulation of a silicon field emission electron source

F Santagata, CK Yang, JF Creemer, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings Eurosensors XXII
Editors s.n.
Place of PublicationDresden, Germany
PublisherEurosensors XXII
Pages625-628
Number of pages4
ISBN (Print)978-3-00-025217-4
Publication statusPublished - 2008
EventEurosensors XXII: The 22nd International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems - Dresden, Germany
Duration: 7 Sept 200810 Sept 2008
Conference number: 22

Publication series

Name
PublisherEurosensors XXII

Conference

ConferenceEurosensors XXII
Country/TerritoryGermany
CityDresden
Period7/09/0810/09/08

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

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