Thin Ta films: growth, stability, and diffusion studied by molecular-dynamics simulations

TPC Klaver, BJ Thijsse

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{2b3e4c4ec78c45e68c8c12910bb399d3,

title = "Thin Ta films: growth, stability, and diffusion studied by molecular-dynamics simulations",

keywords = "ZX CWTS JFIS < 1.00",

author = "TPC Klaver and BJ Thijsse",

year = "2002",

language = "Undefined/Unknown",

volume = "413",

pages = "110--120",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}