Thin titanium nitride films deposited using DC magnetron sputtering used for neural stimulation and sensing purposes

NS Lawand; PJ French; J Briaire; JHM Frijns

doi:10.1016/j.proeng.2012.09.250

Thin titanium nitride films deposited using DC magnetron sputtering used for neural stimulation and sensing purposes

NS Lawand, PJ French, J Briaire, JHM Frijns

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

23 Citations (Scopus)

Original language	English
Title of host publication	Proceedings 26th European Conference on Solid-State Transducers
Editors	JA Dziuban et al
Place of Publication	Amsterdam, The Netherlands
Publisher	Elsevier
Pages	726-729
Number of pages	4
DOIs	https://doi.org/10.1016/j.proeng.2012.09.250
Publication status	Published - 2012
Event	EuroSensor 2012, Krakow, Poland - Amsterdam, The Netherlands Duration: 9 Sept 2012 → 12 Sept 2012

Publication series

Name
Publisher	Elsevier

Name	Procedia Engineering
Volume	47
ISSN (Print)	1877-7058

Conference

Conference	EuroSensor 2012, Krakow, Poland
Period	9/09/12 → 12/09/12

Access to Document

10.1016/j.proeng.2012.09.250

Cite this

Lawand, NS., French, PJ., Briaire, J., & Frijns, JHM. (2012). Thin titanium nitride films deposited using DC magnetron sputtering used for neural stimulation and sensing purposes. In JA. Dziuban et al (Ed.), Proceedings 26th European Conference on Solid-State Transducers (pp. 726-729). (Procedia Engineering; Vol. 47). Elsevier. https://doi.org/10.1016/j.proeng.2012.09.250

@inproceedings{1a3c62eb82e94f8ebab45eec0a98a7f0,

title = "Thin titanium nitride films deposited using DC magnetron sputtering used for neural stimulation and sensing purposes",

author = "NS Lawand and PJ French and J Briaire and JHM Frijns",

year = "2012",

doi = "10.1016/j.proeng.2012.09.250",

language = "English",

publisher = "Elsevier",

pages = "726--729",

editor = "{Dziuban et al}, JA",

booktitle = "Proceedings 26th European Conference on Solid-State Transducers",

note = "EuroSensor 2012, Krakow, Poland ; Conference date: 09-09-2012 Through 12-09-2012",

}

Lawand, NS, French, PJ, Briaire, J & Frijns, JHM 2012, Thin titanium nitride films deposited using DC magnetron sputtering used for neural stimulation and sensing purposes. in JA Dziuban et al (ed.), Proceedings 26th European Conference on Solid-State Transducers. Procedia Engineering, vol. 47, Elsevier, Amsterdam, The Netherlands, pp. 726-729, EuroSensor 2012, Krakow, Poland, 9/09/12. https://doi.org/10.1016/j.proeng.2012.09.250

Thin titanium nitride films deposited using DC magnetron sputtering used for neural stimulation and sensing purposes. / Lawand, NS; French, PJ; Briaire, J et al.
Proceedings 26th European Conference on Solid-State Transducers. ed. / JA Dziuban et al. Amsterdam, The Netherlands: Elsevier, 2012. p. 726-729 (Procedia Engineering; Vol. 47).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Thin titanium nitride films deposited using DC magnetron sputtering used for neural stimulation and sensing purposes

AU - Lawand, NS

AU - French, PJ

AU - Briaire, J

AU - Frijns, JHM

PY - 2012

Y1 - 2012

U2 - 10.1016/j.proeng.2012.09.250

DO - 10.1016/j.proeng.2012.09.250

M3 - Conference contribution

SP - 726

EP - 729

BT - Proceedings 26th European Conference on Solid-State Transducers

A2 - Dziuban et al, JA

PB - Elsevier

CY - Amsterdam, The Netherlands

T2 - EuroSensor 2012, Krakow, Poland

Y2 - 9 September 2012 through 12 September 2012

ER -

Lawand NS, French PJ, Briaire J, Frijns JHM. Thin titanium nitride films deposited using DC magnetron sputtering used for neural stimulation and sensing purposes. In Dziuban et al JA, editor, Proceedings 26th European Conference on Solid-State Transducers. Amsterdam, The Netherlands: Elsevier. 2012. p. 726-729. (Procedia Engineering). doi: 10.1016/j.proeng.2012.09.250