Thinning of micromachined wafers for high-density, through-wafer interconnects

L Wang, CCG Visser, CR de Boer, M Laros, W van der Vlist, J Groeneweg, G Craciun, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of SAFE 2002
Place of Publication	Utrecht
Publisher	STW Stichting voor de Technische Wetenschappen
Pages	121-126
Number of pages	6
ISBN (Print)	90-73461-33-2
Publication status	Published - 2002
Event	SAFE 2002 ProRISC 2002 SeSens 2002 Veldhoven, the Netherlands - Utrecht Duration: 27 Nov 2002 → 28 Nov 2002

Name
Publisher	STW Stichting voor de Technische Wetenschappen

Conference	SAFE 2002 ProRISC 2002 SeSens 2002 Veldhoven, the Netherlands
Period	27/11/02 → 28/11/02

Keywords

@inproceedings{19e322bc46554b6e8ef9603e51608a90,

title = "Thinning of micromachined wafers for high-density, through-wafer interconnects",

keywords = "Conf.proc. > 3 pag",

author = "L Wang and CCG Visser and {de Boer}, CR and M Laros and {van der Vlist}, W and J Groeneweg and G Craciun and PM Sarro",

year = "2002",

language = "Undefined/Unknown",

isbn = "90-73461-33-2",

publisher = "STW Stichting voor de Technische Wetenschappen",

pages = "121--126",

booktitle = "Proceedings of SAFE 2002",

note = "null ; Conference date: 27-11-2002 Through 28-11-2002",

}

Proceedings of SAFE 2002. Utrecht : STW Stichting voor de Technische Wetenschappen, 2002. p. 121-126.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Thinning of micromachined wafers for high-density, through-wafer interconnects

AU - Wang, L

AU - Visser, CCG

AU - de Boer, CR

AU - Laros, M

AU - van der Vlist, W

AU - Groeneweg, J

AU - Craciun, G

AU - Sarro, PM

PY - 2002

Y1 - 2002

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 90-73461-33-2

SP - 121

EP - 126

BT - Proceedings of SAFE 2002

PB - STW Stichting voor de Technische Wetenschappen

CY - Utrecht

Y2 - 27 November 2002 through 28 November 2002

ER -