Three-dimensional rigorous simulation of mask induced polarization

X Wei, HP Urbach, Y Aksenov, AJH Wachters

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	567-575
Number of pages	9
Journal	Proceedings of SPIE- International Society for Optical Engineering
Volume	5754
Publication status	Published - 2005

Keywords

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title = "Three-dimensional rigorous simulation of mask induced polarization",

keywords = "conference contrib. refereed, Peer-lijst tijdschrift",

author = "X Wei and HP Urbach and Y Aksenov and AJH Wachters",

year = "2005",

language = "Undefined/Unknown",

volume = "5754",

pages = "567--575",

journal = "Proceedings of SPIE- International Society for Optical Engineering",

issn = "0277-786X",

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}

TY - JOUR

T1 - Three-dimensional rigorous simulation of mask induced polarization

AU - Wei, X

AU - Urbach, HP

AU - Aksenov, Y

AU - Wachters, AJH

PY - 2005

Y1 - 2005

KW - conference contrib. refereed

KW - Peer-lijst tijdschrift

UR - http://www.spie.org

M3 - Conference article

SN - 0277-786X

VL - 5754

SP - 567

EP - 575

JO - Proceedings of SPIE- International Society for Optical Engineering

JF - Proceedings of SPIE- International Society for Optical Engineering

ER -