Three-dimensional rigorous simulation of mask induced polarization

X Wei, HP Urbach, Y Aksenov, AJH Wachters

Research output: Contribution to journalConference articleScientificpeer-review

4 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)567-575
Number of pages9
JournalProceedings of SPIE- International Society for Optical Engineering
Volume5754
Publication statusPublished - 2005

Keywords

  • conference contrib. refereed
  • Peer-lijst tijdschrift

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