| Original language | Undefined/Unknown |
|---|---|
| Patent number | US 6081578 |
| IPC | Aanvrager: Philips Corporation |
| Priority date | 27/06/00 |
| Publication status | Published - 2000 |
Three-mirror system for lithographic projection and projection apparatus comprising such a mirror system.
JJM Braat (Inventor)
Research output: Patent