Through-Focus Point-Spread Function Evaluation fro Lens Metrology using the extended Nijboer-Zernike Theory

JJM Braat, P. Dirksen, AJEM Janssen

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationFringe 2005
EditorsW Osten
Place of PublicationBerlin
PublisherSpringer
Pages299-307
Number of pages9
ISBN (Print)3-540-26037-4
Publication statusPublished - 2005
EventThe 5th international workshop on automatic processing of Fringe patterns - Berlin
Duration: 12 Sep 200514 Sep 2005

Publication series

Name
PublisherSpringer

Conference

ConferenceThe 5th international workshop on automatic processing of Fringe patterns
Period12/09/0514/09/05

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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