Through Silicon Interconnect Using grayscale Lithography for MEMS Applications

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

3 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationEurosensors XXIII
EditorsJ Brugger, D Briand
PublisherElsevier
Pages1543-1546
Number of pages4
Publication statusPublished - 2009
EventEurosensors XXIII - Lausanne, Switzerland
Duration: 6 Sep 20099 Sep 2009

Publication series

Name
PublisherElsevier BV

Conference

ConferenceEurosensors XXIII
CountrySwitzerland
CityLausanne
Period6/09/099/09/09

Keywords

  • Conf.proc. > 3 pag

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