@inproceedings{69790f122a26429d9c4c1b58201592c3,
title = "Through-wafer copper plugs formation for 3-dimensional ICs",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "NT Nguyen and E Boellaard and PN Pham and VG Kiutchoukov and G Cracium and PM Sarro",
year = "2001",
language = "Undefined/Unknown",
isbn = "90-73461-29-4",
publisher = "STW Technology Foundation",
pages = "141--144",
booktitle = "SAFE/ProRISC 2001: proceedings CD-ROM",
note = "Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven ; Conference date: 28-11-2001 Through 30-11-2001",
}