Through-wafer electrical vias for RF silicon technology

Z Wang; L Wang; H Schellevis; WHA Wien; JN Burghartz; PM Sarro

Through-wafer electrical vias for RF silicon technology

Z Wang, L Wang, H Schellevis, WHA Wien, JN Burghartz, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	SAFE 2003 Proceedings of semiconductor advances for future electronics
Editors	s.n.
Place of Publication	Utrecht
Publisher	Stichting voor de Technische Wetenschap
Pages	761-765
Number of pages	5
ISBN (Print)	90-73461-39-1
Publication status	Published - 2003
Event	Semiconductor advances for future electronics, Veldhoven, The Netherlands - Utrecht Duration: 25 Nov 2003 → 26 Nov 2003

Publication series

Name
Publisher	Stichting voor de Technische Wetenschap

Conference

Conference	Semiconductor advances for future electronics, Veldhoven, The Netherlands
Period	25/11/03 → 26/11/03

Bibliographical note

CD-ROM

Keywords

Vakpubl., Overig wet. > 3 pag

Cite this

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title = "Through-wafer electrical vias for RF silicon technology",

keywords = "Vakpubl., Overig wet. > 3 pag",

author = "Z Wang and L Wang and H Schellevis and WHA Wien and JN Burghartz and PM Sarro",

note = "CD-ROM; Semiconductor advances for future electronics, Veldhoven, The Netherlands ; Conference date: 25-11-2003 Through 26-11-2003",

year = "2003",

language = "Undefined/Unknown",

isbn = "90-73461-39-1",

publisher = "Stichting voor de Technische Wetenschap",

pages = "761--765",

editor = "s.n.",

booktitle = "SAFE 2003 Proceedings of semiconductor advances for future electronics",

}

TY - GEN

T1 - Through-wafer electrical vias for RF silicon technology

AU - Wang, Z

AU - Wang, L

AU - Schellevis, H

AU - Wien, WHA

AU - Burghartz, JN

AU - Sarro, PM

N1 - CD-ROM

PY - 2003

Y1 - 2003

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 90-73461-39-1

SP - 761

EP - 765

BT - SAFE 2003 Proceedings of semiconductor advances for future electronics

A2 - s.n., null

PB - Stichting voor de Technische Wetenschap

CY - Utrecht

T2 - Semiconductor advances for future electronics, Veldhoven, The Netherlands

Y2 - 25 November 2003 through 26 November 2003

ER -