Through-wafer interconnect technology for silicon

VG Kutchoukov, M Shikida, JR Mollinger, A Bossche

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1029-1036
Number of pages	8
Journal	Journal of Micromechanics and Microengineering
Volume	14
Publication status	Published - 2004

Keywords

@article{684cc87ee40c4f598b9c9577dd9be519,

title = "Through-wafer interconnect technology for silicon",

keywords = "ZX CWTS 1.00 <= JFIS < 3.00",

author = "VG Kutchoukov and M Shikida and JR Mollinger and A Bossche",

year = "2004",

language = "Undefined/Unknown",

volume = "14",

pages = "1029--1036",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

}