Time-frequency analysis of lifted and standard iterative learning control applied to the short stroke of a wafer stage test rig

I Rotariu, BG Dijkstra, R Ellenbroek, M Steinbuch

Research output: Book/Report › Report › Professional

Original language	Undefined/Unknown
Place of Publication	Delft
Publisher	Delft University of Technology WbMT
Number of pages	32
Publication status	Published - 2002

Name
Publisher	Delft University of Technology WbMT

Confidential

Keywords

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keywords = "Geen BTA classificatie",

author = "I Rotariu and BG Dijkstra and R Ellenbroek and M Steinbuch",

note = "Confidential",

year = "2002",

language = "Undefined/Unknown",

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TY - BOOK

T1 - Time-frequency analysis of lifted and standard iterative learning control applied to the short stroke of a wafer stage test rig

AU - Rotariu, I

AU - Dijkstra, BG

AU - Ellenbroek, R

AU - Steinbuch, M

N1 - Confidential

PY - 2002

Y1 - 2002

KW - Geen BTA classificatie

M3 - Report

BT - Time-frequency analysis of lifted and standard iterative learning control applied to the short stroke of a wafer stage test rig

PB - Delft University of Technology WbMT

CY - Delft

ER -