Titanium nitride for MEMS hotplates

JF Creemer; PM Sarro; M Laros; H Schellevis; T Nathoeni; LA Steenweg; V Svetchnikov; HW Zandbergen

Titanium nitride for MEMS hotplates

JF Creemer, PM Sarro, M Laros, H Schellevis, T Nathoeni, LA Steenweg, V Svetchnikov, HW Zandbergen

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE 2004; Semiconductor advances for future electronics
Editors	W Krautschneider, C Claeys
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	742-746
Number of pages	5
ISBN (Print)	90-73461-43X
Publication status	Published - 2004
Event	Semiconductor advances for future electronics, Veldhoven, The Netherlands - Utrecht Duration: 25 Nov 2004 → 26 Nov 2004

Publication series

Name
Publisher	STW Technology Foundation

Conference

Conference	Semiconductor advances for future electronics, Veldhoven, The Netherlands
Period	25/11/04 → 26/11/04

Keywords

Vakpubl., Overig wet. > 3 pag

Cite this

@inproceedings{ca90b8d8d19a4d47b0655e064ace8720,

title = "Titanium nitride for MEMS hotplates",

keywords = "Vakpubl., Overig wet. > 3 pag",

author = "JF Creemer and PM Sarro and M Laros and H Schellevis and T Nathoeni and LA Steenweg and V Svetchnikov and HW Zandbergen",

year = "2004",

language = "Undefined/Unknown",

isbn = "90-73461-43X",

publisher = "STW Technology Foundation",

pages = "742--746",

editor = "W Krautschneider and C Claeys",

booktitle = "SAFE 2004; Semiconductor advances for future electronics",

note = "Semiconductor advances for future electronics, Veldhoven, The Netherlands ; Conference date: 25-11-2004 Through 26-11-2004",

}

Creemer, JF, Sarro, PM, Laros, M, Schellevis, H, Nathoeni, T, Steenweg, LA, Svetchnikov, V & Zandbergen, HW 2004, Titanium nitride for MEMS hotplates. in W Krautschneider & C Claeys (eds), SAFE 2004; Semiconductor advances for future electronics. STW Technology Foundation, Utrecht, pp. 742-746, Semiconductor advances for future electronics, Veldhoven, The Netherlands, 25/11/04.

TY - GEN

T1 - Titanium nitride for MEMS hotplates

AU - Creemer, JF

AU - Sarro, PM

AU - Laros, M

AU - Schellevis, H

AU - Nathoeni, T

AU - Steenweg, LA

AU - Svetchnikov, V

AU - Zandbergen, HW

PY - 2004

Y1 - 2004

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 90-73461-43X

SP - 742

EP - 746

BT - SAFE 2004; Semiconductor advances for future electronics

A2 - Krautschneider, W

A2 - Claeys, C

PB - STW Technology Foundation

CY - Utrecht

T2 - Semiconductor advances for future electronics, Veldhoven, The Netherlands

Y2 - 25 November 2004 through 26 November 2004

ER -