Towards a Scalable Sun Position Sensor with Monolithic Integration of the 3d Optics for Miniaturized Satellite Attitude Control

Joost Romijn; Sten Vollebregt; Henk W. van Zeijl; Guoqi Zhang; Johan Leijtens; Pasqualina M. Sarro

doi:10.1109/MEMS51782.2021.9375434

Towards a Scalable Sun Position Sensor with Monolithic Integration of the 3d Optics for Miniaturized Satellite Attitude Control

Joost Romijn, Sten Vollebregt, Henk W. van Zeijl, Guoqi Zhang, Johan Leijtens, Pasqualina M. Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

3 Citations (Scopus)

32 Downloads (Pure)

Abstract

In this paper we present a sun position sensor platform with a scalable approach for the 3D integration of the sensor optics. This would facilitate the sun position sensor miniaturization, reduces fabrication cost and mitigates the need for sensor calibration. The sun position sensor platform is implemented in a seven mask BICMOS technology with optical windows between the light masking layer and CMOS image sensor implemented by adhesively bonded glass windows. The CMOS sensor functionality is experimentally verified by modulation of a light spot using a laser. The proposed approach enables wafer-scale fabrication of the 3D optics that includes the wafer stepper accurate overlay alignment of the apertures. This mitigates the need for cumbersome alignment of the apertures at die or package level and facilitates further miniaturization, accuracy and sensor cost.

Original language	English
Title of host publication	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Publisher	IEEE
Pages	642-645
Number of pages	4
ISBN (Electronic)	978-1-6654-1912-3
ISBN (Print)	978-1-6654-3024-1
DOIs	https://doi.org/10.1109/MEMS51782.2021.9375434
Publication status	Published - 2021
Event	2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) - Gainesville/Online, United States Duration: 25 Jan 2021 → 29 Jan 2021 Conference number: 34

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2021-January
ISSN (Print)	1084-6999

Conference

Conference	2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Country/Territory	United States
City	Gainesville/Online
Period	25/01/21 → 29/01/21

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care

Keywords

3D integrated optics
sun position sensor
CMOS image sensor
adhesive bonding

Access to Document

10.1109/MEMS51782.2021.9375434

09375434Final published version, 1.72 MB

Cite this

Romijn, J., Vollebregt, S., van Zeijl, H. W., Zhang, G., Leijtens, J., & Sarro, P. M. (2021). Towards a Scalable Sun Position Sensor with Monolithic Integration of the 3d Optics for Miniaturized Satellite Attitude Control. In 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 (pp. 642-645). Article 9375434 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2021-January). IEEE. https://doi.org/10.1109/MEMS51782.2021.9375434

Romijn, Joost ; Vollebregt, Sten ; van Zeijl, Henk W. et al. / Towards a Scalable Sun Position Sensor with Monolithic Integration of the 3d Optics for Miniaturized Satellite Attitude Control. 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. IEEE, 2021. pp. 642-645 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Towards a Scalable Sun Position Sensor with Monolithic Integration of the 3d Optics for Miniaturized Satellite Attitude Control",

abstract = "In this paper we present a sun position sensor platform with a scalable approach for the 3D integration of the sensor optics. This would facilitate the sun position sensor miniaturization, reduces fabrication cost and mitigates the need for sensor calibration. The sun position sensor platform is implemented in a seven mask BICMOS technology with optical windows between the light masking layer and CMOS image sensor implemented by adhesively bonded glass windows. The CMOS sensor functionality is experimentally verified by modulation of a light spot using a laser. The proposed approach enables wafer-scale fabrication of the 3D optics that includes the wafer stepper accurate overlay alignment of the apertures. This mitigates the need for cumbersome alignment of the apertures at die or package level and facilitates further miniaturization, accuracy and sensor cost.",

keywords = "3D integrated optics, sun position sensor, CMOS image sensor, adhesive bonding",

author = "Joost Romijn and Sten Vollebregt and {van Zeijl}, {Henk W.} and Guoqi Zhang and Johan Leijtens and Sarro, {Pasqualina M.}",

note = "Green Open Access added to TU Delft Institutional Repository {\textquoteleft}You share, we take care!{\textquoteright} – Taverne project https://www.openaccess.nl/en/you-share-we-take-care ; 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) ; Conference date: 25-01-2021 Through 29-01-2021",

year = "2021",

doi = "10.1109/MEMS51782.2021.9375434",

language = "English",

isbn = "978-1-6654-3024-1",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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Romijn, J, Vollebregt, S , van Zeijl, HW , Zhang, G, Leijtens, J & Sarro, PM 2021, Towards a Scalable Sun Position Sensor with Monolithic Integration of the 3d Optics for Miniaturized Satellite Attitude Control. in 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021., 9375434, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2021-January, IEEE, pp. 642-645, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Gainesville/Online, United States, 25/01/21. https://doi.org/10.1109/MEMS51782.2021.9375434

Towards a Scalable Sun Position Sensor with Monolithic Integration of the 3d Optics for Miniaturized Satellite Attitude Control. / Romijn, Joost; Vollebregt, Sten ; van Zeijl, Henk W. et al.
34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. IEEE, 2021. p. 642-645 9375434 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2021-January).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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AU - Zhang, Guoqi

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AU - Sarro, Pasqualina M.

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AB - In this paper we present a sun position sensor platform with a scalable approach for the 3D integration of the sensor optics. This would facilitate the sun position sensor miniaturization, reduces fabrication cost and mitigates the need for sensor calibration. The sun position sensor platform is implemented in a seven mask BICMOS technology with optical windows between the light masking layer and CMOS image sensor implemented by adhesively bonded glass windows. The CMOS sensor functionality is experimentally verified by modulation of a light spot using a laser. The proposed approach enables wafer-scale fabrication of the 3D optics that includes the wafer stepper accurate overlay alignment of the apertures. This mitigates the need for cumbersome alignment of the apertures at die or package level and facilitates further miniaturization, accuracy and sensor cost.

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Romijn J, Vollebregt S , van Zeijl HW , Zhang G, Leijtens J, Sarro PM. Towards a Scalable Sun Position Sensor with Monolithic Integration of the 3d Optics for Miniaturized Satellite Attitude Control. In 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. IEEE. 2021. p. 642-645. 9375434. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS51782.2021.9375434

Towards a Scalable Sun Position Sensor with Monolithic Integration of the 3d Optics for Miniaturized Satellite Attitude Control

Abstract

Publication series

Conference

Bibliographical note

Keywords

Access to Document

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Integrated silicon carbide sun position sensor system-on-chip for space applications

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