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Towards CMOS Bulk Sensing for In-Situ Evaluation of ALD Coatings for Millimeter Sized Implants
Kambiz Nanbakhsh, Riina Ritasalo, Wouter A. Serdijn, Vasiliki Giagka
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
1
Citation
(Scopus)