Towards Commercially Available Quartz Calibration Substrates

Luca Galatro, Carmine De Martino, Jos van 't Hof, Mohammed Alomari, Holger Sailer, Joachim Burghartz, Marco Spirito

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

In this contribution we present the developments and current performance of calibration substrates manufactured on 150 mm Quartz wafers (675 μm thick) based on a CMOS process technology. The passive structures required to realize on-wafer vector network analyzer calibration standards are benchmarked against commercially available (i.e., Alumina) substrates. First, an analysis of the process stability is presented for both reflective and resistive impedances across the entire wafer (i.e., 24 dies). Full-wave EM simulations are employed to realize accurate calibration artefact models aiming to achieve state-of-the-art calibration accuracy. The calibration quality in finally benchmarked on an independent line realized in the back-end-of-line of a Silicon based technology up to 67.5 GHz.
Original languageEnglish
Title of host publication2020 95th ARFTG Microwave Measurement Conference (ARFTG)
Subtitle of host publicationProceedings
PublisherIEEE
Pages1-5
Number of pages5
ISBN (Electronic)978-1-7281-0951-0
ISBN (Print)978-1-7281-0952-7
DOIs
Publication statusPublished - 2020
EventARFTG 2020: The 95th ARFTG Microwave Measurement Conference (ARFTG) - Los Angeles, United States
Duration: 4 Aug 20206 Aug 2020
Conference number: 95

Conference

ConferenceARFTG 2020
CountryUnited States
CityLos Angeles
Period4/08/206/08/20

Keywords

  • VNA
  • calibration
  • on-wafer
  • probe-level
  • RSOL
  • fused silica

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