Towards fast AFM-based nanometrology and nanomanufacturing

G Schitter, J. Steininger, FCA Heuck, U Staufer

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	392-418
Number of pages	27
Journal	International Journal of Nanomanufacturing
Volume	8
Issue number	5/6
Publication status	Published - 2012

Keywords

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title = "Towards fast AFM-based nanometrology and nanomanufacturing",

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author = "G Schitter and J. Steininger and FCA Heuck and U Staufer",

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T1 - Towards fast AFM-based nanometrology and nanomanufacturing

AU - Schitter, G

AU - Steininger, J.

AU - Heuck, FCA

AU - Staufer, U

PY - 2012

Y1 - 2012

KW - academic journal papers

KW - Vakpubl., Overig wet. > 3 pag

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EP - 418

JO - International Journal of Nanomanufacturing

JF - International Journal of Nanomanufacturing

SN - 1746-9392

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