Towards fast AFM-based nanometrology and nanomanufacturing

G Schitter, J. Steininger, FCA Heuck, U Staufer

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)392-418
Number of pages27
JournalInternational Journal of Nanomanufacturing
Volume8
Issue number5/6
Publication statusPublished - 2012

Keywords

  • academic journal papers
  • Vakpubl., Overig wet. > 3 pag

Cite this